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Raman thermometry is a thermal characterization technique which makes use of Raman scattering phenomena to determine the local temperature in microelectronics systems. Non-contact character. High spatial resolution (sub-micron scale). In-depth analysis within IR-transparent samples. Fast acquisition time, 10 ms to 1 s of exposure to acquire a full a Raman spectrum. Temporal resolution as short as hundreds of nanoseconds in dedicated systems
IR thermal microscopy (or infrared radiation thermometry) analyses the spatial distribution of the emitted infrared radiation either over the device surface or eventually inside the inspected device. This technique enables us to obtain 2D temperature maps, which are used to detect temperature gradients and hot spots. Along with Raman thermometry and thermoreflectance thermal imaging, it constitutes one of the main non-contact techniques (optical methods) for thermal analysis